JPH01133729U - - Google Patents
Info
- Publication number
- JPH01133729U JPH01133729U JP3056188U JP3056188U JPH01133729U JP H01133729 U JPH01133729 U JP H01133729U JP 3056188 U JP3056188 U JP 3056188U JP 3056188 U JP3056188 U JP 3056188U JP H01133729 U JPH01133729 U JP H01133729U
- Authority
- JP
- Japan
- Prior art keywords
- baking
- baking chamber
- infrared heater
- far
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056188U JPH01133729U (en]) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056188U JPH01133729U (en]) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133729U true JPH01133729U (en]) | 1989-09-12 |
Family
ID=31255724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3056188U Pending JPH01133729U (en]) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133729U (en]) |
-
1988
- 1988-03-08 JP JP3056188U patent/JPH01133729U/ja active Pending